A Systematic Analysis of Microstructured Silicon ATR-FTIR Reflection Elements: Operating Parameters, Performance, and Underlying Phenomena

Microstructured silicon internal reflection elements (μSi-IREs) have the potential to revolutionize attenuated total reflection Fourier transform infrared (ATR-FTIR) spectroscopy. This study compares the analytical performance of leading μSi-IREs from three prominent providers, examining the influence of ridge angle and sensor footprint on key figures of merit.

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A Systematic Analysis of Microstructured Silicon ATR-FTIR Reflection Elements: Operating Parameters, Performance, and Underlying Phenomena

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